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A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future.

Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology. He obtained his B.


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He then moved on to the Department of Engineering at the University of Tokushima in and was promoted to full professor in His current research interests include photochemistry, light-matter interaction, ultra-fast processes in materials, photonic crystals, and plasmonics. He has authored more than papers. Table of contents List of Contributors. Laser-based techniques are the most common approach for producing microstructures.

Typical techniques involve the use of lasers to add or subtract material from a bulk sample. Recent applications of lasers involve the use of ultrashort pulses of lasers focused to a small area in order to create a pattern that is layered to create a structure.

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Ultrafast laser processing of materials: from science to industry

The use of lasers in such a manner is known as laser direct-writing LDW. Microscopic mechanical elements such as micromotors, micropumps, and other microfluidic devices can be produced using direct-write concepts. In addition to additive and subtractive processes, LDW allows for the modification of the properties of a material. Mechanisms that allow for these modifications include sintering, microstereolithography, and multiphoton processes. These use a series of laser pulses to deliver a precise amount of energy to induce a physical or chemical change that can result in annealing and surface structuring of a material.

Microstereolithography is a common technique based on stereolithography principles. Earlier systems that employ this technique use a scanning principle in which a focused light beam is fixed onto one location and the translation stage moves to fabricate each layer vector by vector. A faster alternate involves using a projection principle in which the image is projected onto the surface of the resin so that the irradiation of a layer is done in one step only. The high-resolution results allow for the fabrication of complex shapes that would otherwise be difficult to produce at such small scales.

Multiphoton Lithography can be used to 3D print structures with sub-micrometer resolution. The process uses the focal point of a laser to photopolymerize the resin or glass at a specific point. By moving the focal point around in three dimensional space and solidifying the medium at different points, the desired geometry can be built.

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There are currently limits to the resolution of the features in geometries built through this method. The limits relate to the medium that the geometry is being constructed from as well as the precision of the focal point of the laser. Additive processes involve the layering of materials in a certain pattern. These include laser chemical vapor deposition LCVD , which use organic precursors to write patterns on a structure or bulk material.

This application can be found in the field of electronics, particularly in the repair of transistor arrays for displays.

3D Laser Microfabrication: Principles and Applications

Another additive process is laser-induced forward transfer LIFT , which uses pulsed lasers aimed at a coated substrate to transfer material in the direction of the laser flow. Focus on the 3D microstructures now, it have been focused in a lot of microsystems like electronic, mechanical, micro-optical and analysis systems. And when this technology is developing, we found that the traditional and conventional micro machining technologies like surface micromachining, bulk micromachining and GIGA process are not sufficient to fabricate or produce oblique and curved 3D microstructures.

The basic setup of inclined UV exposure has conventional UV source, a contact stage, and a tilting stage. Plus, we place a photomask and a photoresist coated substrate between the upper and lower plates of the contact stage, and it is fixed by pushing up the lower plate with a screw. Then, we can expose the photoresist to the inclined UV. It is contacted with a photomask using the contact stage.

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This stage, is leaned against the tilting stage and the resist is exposed to the UV. In the end, the resist is developed in the SU-8 for about 10 to 15 minutes at the room temperature with mild agitation and then, rinsed with isopropyl alcohol.


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  • 3D laser microfabrication: principles and applications.

Besides that, there can be a lot of other procedures. When the trace of the incident UV with a right angle is on a straight line, so the patterns of a photomask are transcribed to the resist. When talking about inclined UV exposure processes, the UV is refracted and reflected, this makes it possible to fabricate various of 3D structures.

The microstructures fabricated by the 3D micro fabrication technology can be allied to a lot of microsystems directly. Also, it can be used as the molds for electroplating. As a result, these technology can be applied to a variety of fields like filters, mixers, jets, micro channels, light guide panels of LCD monitor and more. But 3D structuring using these techniques is very complicated, experimentally.

This can limit their upscaling and broad applicability. Nature offers a large number of ideas for the design of novel materials with superior properties. Self-assembly and self-organization being the main principle of structure formation in nature attract significant interest as promising concepts for the design of intelligent materials. Mostly, homogenous expansion or contraction in all directions can result a change of conditions. Also, inhomogeneous expansion and shrinkage can result more complex behavior like bending, twisting and folding and they can happen with different magnitudes in different directions.

Utilization of these phenomena for the design of structured materials can be highly attractive because they allow simple, template-free fabrication of very complex repetitive 2D and 3D patterns. However, they cannot be prepared by using sophisticated fabrication methods like two-photon and interference photolithography as mentioned before. There is an advantage of the self-folding approach, is the possibility of quick, reversible, and reproducible fabrication of 3D hollow objects with controlled chemical properties and morphology of both the exterior and the interior.

One experimental application of self-folding materials is pasta that ships flat but folds into the desired shape on contact with boiling water.